◆ Working temperature: 300 ~ 1200 ℃
◆ effective aperture according to the user to determine the diffusion sheet, can be customized
◆ thermostatic zone length: 920mm-1350mm (can be customized according to user requirements)
◆ temperature zone accuracy (static closed tube test):
600 ℃ <Operating temperature <1200 ℃: ± 0.5 ℃
300 ℃ ≤ Working temperature ≤ 600 ℃: ± 1 ℃
◆ Single point temperature stability (static closed tube test):
600 ℃ <Operating temperature <1200 ℃: ± 0.5 ℃ / 24h
300 ℃ ≤ Working temperature ≤ 600 ℃: ± 1 ℃ / 24h
◆ Temperature ramping capability:
Maximum controllable heating rate (300 ~ 1300 ℃): 15 ℃ / min
Maximum cooling rate (1300 ~ 900 ℃): 5 ℃ / min
◆ gas flow setting accuracy: ± 0.5% FS
◆ gas system tightness: 1 × 10-7pa.m3 / s
◆ automatic feeding device itinerary: ~ 2000mm
Speed: 5 ~ 1000mm/min, SiC slurry loading 20kg
◆ loading number 400 / tubes
◆ purification station cleanliness 100 (10,000 plants)
◆ three-phase five-wire 380V ± 10%, 50Hz ± 10% Hz;
◆ Cooling water: 2 ~ 4Kgf/cm2, ~ 8L/min
Solar cell proliferation are open tube diffusion and diffusion in two forms closed tube soft landing
◆ closed tube phosphorus diffusion, with a process gas cooling orientation recovery, metaphosphoric acid, CL2 separate collection and processing; centralized collection process exhaust discharged from the tail orientation; various process gases can be separated into the quartz tube, the process gases (phosphorus oxychloride ) can be introduced into the spray mode quartz tube. Closed tube soft landing diffusion process is completely free from outside interference environment, process quality fully protected.
◆ degree of automation: automatic control of temperature and process. Master thermostat module adopts imported, you can reach the control accuracy of ± 0.25 ℃.
◆ get to take tablets by: Cantilever sliding boat. Using the sliding side of the cantilever structure of the layout, which can effectively prevent dripping of metaphosphoric acid, causing sliding bodies are subject to corrosion, affecting the accuracy of the sliding mechanism.