First, use
This device practical and 2-4 inch GaAs deoxy perfect equipment, automatic control system, manual operation (can be 2-4 inches GaAs deoxidation process).
Second, the main technical indicators
1, appearance forms: single-tube horizontal structure
2, the maximum design temperature: 1000 ℃
3, temperature range: 100 ℃ - 1000 ℃
4, the temperature zone length: 600mm.
6, craft quartz tube diameter: 2-4 inches.
7, Temperature Control: Hao Yu YH-8500 R & D Systems (automatic touch screen control)
8, the temperature zone Accuracy: ≤ ± 1 ℃ / 600mm (operating range)
9, a single point temperature stability: ≤ ± 1 ℃ / 24h
10, the temperature Repeatability: ≤ ± 1 ℃ / 24h
11, ramping capacity: maximum controllable heating rate of 15 ℃ / min, the maximum controllable cooling rate: 5 ℃ / min
12, the total power: 20KW.
13, holding total power: less than 9KW.
14, Spike external temperature control thermocouple: K indexing.
15, working vacuum: ≤ 10X10-4Pa
16, the sealing performance: leakage rate ≤ 1X10-7Pa · m3 / s
17, the vacuum unit: primary pump mechanical pump, two molecular pump oil pump
18, the vacuum valve: Automatic electromagnetic vacuum valve
19, the gas system tightness: 1X10-7 Pa · M3 / S
20, the alarm system: over-temperature alarm, burnout alarm, fault alarm vacuum, the vacuum chamber pressure anomaly alarm,
21, control: process control temperature (complete with touch screen controls)
22, Power: two-phase three-wire 220V.
24, set aside all the way to bleed port.